39 Mark Oxman, process engineer and responsible for the PROCESS topics, photolithography equipment (MA6, MLA, workstations), ICP-RIE, optical measurement equipment (LEXT), XRF, and supporting infrastructure. Moshe Feldberg, responsible for the clean rooms, evaporation and sputtering machine (BESTEC), plasma cleaning equipment (DIENER), mechanical profiler, 3D printing. Dr .Yossi Abulafia, physicist, Head of Fabrication Unit , responsible for processes and equipment e-Beam Lithography (BESTEC, ELIONIX), ALD, wiring/ measuring stations and WAFER BONDER, MATLAB simulations. Dr. Sergi Kanornsky, physicist / optical designer, is responsible for evaporation machines for optical devices (IBS, VST), optical design and analysis.
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